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Classification of MFM Gas Mass Flow Sensors

Based on the core sensing technology, MFMs are mainly divided into two families: thermal and laminar differential pressure.

Thermal Mass Flow Meters

This is the most common and widely used type. Its core principle is based on heat being carried away by the gas flow. Two operating modes are typically used: “constant temperature difference” or “constant power”.

Based on sensor structure, this type can be further subdivided:

Sensor Structure Working Principle Characteristics
Capillary / Bypass type The main flow path is split; most gas goes through the main pipe; a small portion flows through a capillary tube, and the total flow is calculated proportionally. Advantage: Sensor does not contact gas directly – can measure corrosive gases.
Disadvantage: Pressure loss exists; not suitable for low‑pressure gases.
In‑line / Invasive type Heating and sensing elements are placed directly in the main flow path. Advantage: Can measure very small flows, very fast response.
Disadvantage: Sensor directly contacts gas – affected by gas impurities and humidity.
MEMS type Uses Micro‑Electro‑Mechanical Systems (MEMS) technology to fabricate a tiny sensor chip on a silicon wafer. Advantage: High integration, ultra‑low power, small size, bi‑directional flow measurement.
Disadvantage: High technical barrier, relatively expensive.

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