MFM and MFC are two common but functionally different devices in the gas flow control field. The core difference is: MFM only "measures", while MFC both "measures" and "controls".
The following table helps you quickly see the differences:
| Comparison Aspect | MFM (Mass Flow Meter) | MFC (Mass Flow Controller) |
|---|---|---|
| Full Name | Mass Flow Meter | Mass Flow Controller |
| Core Function | Measures only gas mass flow | Measurement + closed‑loop control – automatically adjusts flow to a setpoint |
| Structure | Flow sensor, signal conditioning circuit | Flow sensor, proportional control valve, PID control circuit, signal conditioning circuit |
| Output | Outputs an electrical signal proportional to flow (e.g., 4‑20mA, 0‑5V, RS485) | In addition to a measurement signal, can also receive a setpoint signal and drive the valve to automatically adjust |
| Includes Valve? | ❌ No valve | ✅ Built‑in or external control valve (normally closed solenoid proportional valve) |
| User Operation | Can only read the flow value; cannot actively change the flow | Can set a target flow; the device automatically adjusts and stabilizes to the setpoint |
| Typical Applications | Gas consumption monitoring, flow double‑checking, system integration, data logging | Semiconductor process gas mixing, chemical reaction injection, combustion control, bioreactor gas supply – any application requiring precise, stable flow |
| Cost | Relatively lower | Relatively higher (due to the added valve and control circuit) |
| Typical Accuracy | ±1%–2% F.S. | ±1% F.S. (control accuracy is often better than measurement accuracy) |
| Response Time | Measurement only – fast response (ms to seconds) | Control response typically 1–5 seconds (depends on PID parameters and valve actuation) |
Contact: James
Phone: +86-15684187478
Tel: +86-15684187478
Email: james.shi@teleclear.cn
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