The installation of an MFC is a systematic process, which can be divided into three main parts: mechanical fixing, gas connection, and electrical connection.
| Module | Key Components | Critical Points |
|---|---|---|
| Mechanical Fixing |
- Base mounting - Tube support |
Use the mounting holes on the bottom for rigid fixing; support the tubing with clamps to prevent stress transfer to the MFC body. |
| Gas Connection |
- Fitting selection - Tube connection - Sealing & leak detection |
Options include VCR fittings (metal gasket seal, for high‑purity gases), Swagelok ferrule fittings (locked by nut and ferrule, easy to assemble/disassemble), etc. Clean and purge the tubing thoroughly before installation. Perform leak detection after installation. |
| Electrical Connection |
- Power supply - Signal wiring |
Verify the supply voltage (e.g., DC ±15V or 24V) and ensure good grounding. For analog (e.g., 0‑5V) and digital (e.g., RS485) signals, cable length is recommended to be no more than 5 meters to reduce attenuation and interference. |
| Additional Components |
- Filter - Shut‑off valve |
Install a high‑precision filter (e.g., 5 μm) upstream of the MFC to protect internal precision parts. If an external shut‑off valve is needed, install it downstream of the MFC. |
It is worth noting that MFCs based on different principles have very different requirements for installation orientation. Thermal MFCs have strict requirements for horizontal or vertical mounting, while laminar differential pressure MFCs are much more flexible and can generally be mounted in any orientation, making them suitable for complex system layouts.
In addition to the core steps above, some details directly determine whether the MFC can work stably over the long term and require special attention.
Gas Compatibility: The gas flowing through the MFC must be fully compatible with its internal materials (e.g., seals, sensor diaphragm). Certain corrosive or polymerizing gases can cause irreversible damage. Always consult the manufacturer‘s compatibility list before operation.
Environmental Requirements: Choose a stable location away from vibration sources (recommended distance ≥5 meters) and electromagnetic interference (e.g., transformers, high‑power motors). Also avoid placing the device in environments with high temperature, high humidity, or corrosive gases – refer to the product manual for specific temperature ranges.
Avoid Fluid Disturbance and Pressure Shocks:
Straight pipe runs: To obtain a stable flow profile, it is recommended to have at least 5 times the pipe diameter straight run upstream of the MFC and 2 times the pipe diameter straight run downstream.
Strictly control operating pressure: Both the upstream supply pressure and downstream back pressure must be strictly kept within the MFC’s rated range. Sudden pressure fluctuations or overpressure can damage the sensor and affect control accuracy.
Clean Operation: Before connecting the tubing, thoroughly purge the piping system with high‑purity nitrogen to remove particles, oil, and moisture, preventing them from clogging the MFC‘s internal precision flow paths.
Contact: James
Phone: +86-15684187478
Tel: +86-15684187478
Email: james.shi@teleclear.cn
Add: Room 1116, Yeda Zhigu Building A, No. 300 Changjiang Road, Yantai ETDZ, Shandong, China
